Germany's women scored three late goals to reach the Euro 2005 semi-finals.
Sarah Bouhaddi's superb double-save denied Birgit Prinz's volley and Conny Pohlers' follow-up effort, while Renate Lingor's corner struck the bar.
Marinette Pichon missed a great chance for the French after the break but Inka Grings forced home the holders' opener.
Lingor scored a penalty after Bouhaddi fouled Grings and, after Prinz hit the bar, Sandra Minnert's free-kick made it 3-0 for the Germans, who face Finland.
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Germany Ladies: Rottenberg, Jones, Grings, Prinz, Lingor (Carlson 79), Mittag (Fuss 46), Minnert, Pohlers (Wunderlich 46), Hingst, Garefrekas, Omilade.
Subs Not Used: Gunther, Smisek, Angerer, Wimbersky, Holl.
Booked: Omilade.
Goals: Grings 72, Lingor 77 pen, Minnert 83.
France Ladies: Bouhaddi, Provost, Georges, Diacre, Soubeyrand, Mugneret-Beghe (Kramo 31), Bompastor, Pichon (Herbert 80), Dusang, Abily, Necib.
Subs Not Used: Capy, Viguier, Casseleux, Thomis, Deville, Lattaf, Bussaglia.
Booked: Kramo, Bouaddi.
Ref: Cristian Ionescu (Romania).